✦ LIBER ✦
Micro-cavities in silicon-on-insulator photonic crystal slabs: Determining resonant frequencies and quality factors accurately
✍ Scribed by Min Qiu
- Publisher
- John Wiley and Sons
- Year
- 2005
- Tongue
- English
- Weight
- 180 KB
- Volume
- 45
- Category
- Article
- ISSN
- 0895-2477
No coin nor oath required. For personal study only.
✦ Synopsis
Micro-cavities in two-dimensional silicon-on-insulator (SOI) photonic-crystal slabs are studied. A combination of the finitedifference time-domain (FDTD) technique and the Pade ´approximation with
Baker's algorithm is used to accurately compute the resonant frequencies and quality factors simultaneously. The simulations show that, for similar cavity structures, the mode quality factors of cavities in SOItype photonic-crystal slabs are much smaller than those in membrane photonic-crystal slabs, and deep etching of air holes is still required to obtain relatively higher Q.