An SOI Michelson interferometer sensor w
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Shyh-Lin Tsao; Peng-Chun Peng
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Article
📅
2001
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John Wiley and Sons
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English
⚖ 111 KB
## Abstract In this paper, we propose a novel silicon‐on‐insulator (SOI) Michelson interferometer sensor with waveguide Bragg reflective gratings as a high‐sensitivity temperature sensor. Due to the SOI waveguide, the Bragg reflective grating has a larger thermal expansion coefficient than the fibe