✦ LIBER ✦
Metrology of optically-unresolved features using interferometric surface profiling and RCWA modeling
✍ Scribed by De Groot, Peter; Colonna de Lega, Xavier; Liesener, Jan; Darwin, Michael
- Book ID
- 115408922
- Publisher
- Optical Society of America
- Year
- 2008
- Tongue
- English
- Weight
- 162 KB
- Volume
- 16
- Category
- Article
- ISSN
- 1094-4087
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