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Metrological problems in parameter measurement for low-temperature plasma

✍ Scribed by O. V. Karpov; A. I. Mekhannikov; N. G. Nurullaev; G. D. Petrov

Publisher
Springer US
Year
1983
Tongue
English
Weight
310 KB
Volume
26
Category
Article
ISSN
0543-1972

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## Abstract Low temperature low pressure hollow cathode plasma jet system working in static magnetic field was investigated by means of time resolved Langmuir probe technique. The hollow cathode discharge was excited in a cylindrical nozzle fabricated from Ti by continuous DC, pulsed DC, continuous