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Metrologic problems of fabricating mirrors for projection nanolithography

✍ Scribed by Zhevlakova, T. A.; Lyubarskii, S. V.

Book ID: 115400893
Publisher: Optical Society of America
Year: 2001
Tongue: English
Weight: 88 KB
Volume: 68
Category: Article
ISSN: 1070-9762
DOI: 10.1364/JOT.68.000488

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