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Methods to reduce the loading effect in selective and non-selective epitaxial growth of sigec layers

✍ Scribed by J Hållstedt; E Suvar; C Menon; P.-E Hellström; M Östling; H.H Radamson

Book ID: 108215014
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 120 KB
Volume: 109
Category: Article
ISSN: 0921-5107
DOI: 10.1016/j.mseb.2003.10.062

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