Temperature stabilized sample stage for
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R Gross; J Bosch; H.-G Wener; J Fischer; R.P Huebener
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Article
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1989
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Elsevier Science
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English
β 491 KB
A cryogenic sample stage for scanning electron microscopes is described. The setup allows performance of measurements in the temperature range from 1.5 K to 300 K. During the measurements the sample can be irradiated directly by the electron beam. The sample temperature can be stabilized by a temper