✦ LIBER ✦
Method using reflection high-energy electron diffraction intensity to determine the solid solubility limit for boron in silicon and Si1−xGex layers
✍ Scribed by Mats I. Larsson; Göran V. Hansson
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 705 KB
- Volume
- 134
- Category
- Article
- ISSN
- 0022-0248
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