Method to Evaluate the Influence of Etching Damage on Microcantilever Surface on Its Mechanical Properties

✍ Scribed by Ueki, Shinji; Nishimori, Yuki; Imamoto, Hiroshi; Kubota, Tomohiro; Sugiyama, Masakazu; Kawakatsu, Hideki; Samukawa, Seiji; Hashiguchi, Gen

• Book ID: 111962624
• Publisher: Institute of Pure and Applied Physics
• Year: 2011
• Tongue: English
• Weight: 308 KB
• Volume: 50
• Category: Article
• ISSN: 0021-4922
• DOI: 10.1143/jjap.50.026503