✦ LIBER ✦
Method of sealing pores in porous low-kSiOC(-H) films fabricated using plasma-assisted atomic layer deposition
✍ Scribed by Chang Young Kim, Hong Seok Lee, Chi Kyu Choi…
- Book ID
- 120798444
- Publisher
- The Korean Physical Society
- Year
- 2013
- Tongue
- English
- Weight
- 388 KB
- Volume
- 62
- Category
- Article
- ISSN
- 0374-4884
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