✦ LIBER ✦
Method for measuring the trench depth of a very-large-scale-integration dynamic random-access memory capacitor based on a Michelson interferometer
✍ Scribed by Takada, K.; Tsurumi, S.; Nakajima, S.; Noda, J.
- Book ID
- 115416080
- Publisher
- Optical Society of America
- Year
- 1986
- Tongue
- English
- Weight
- 357 KB
- Volume
- 11
- Category
- Article
- ISSN
- 0146-9592
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