✦ LIBER ✦
Method for forming a thin film and apparatus of forming a metal thin film utilizing temperature controlling means: Atsushi Sekiguchi, Tsukasa Kobayashi, Shinji Takagi, Fuchu, Japan assigned to Anelva Corporation
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 102 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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