Method for fast-switching the ion beam in an ion-implantation facility : H. Boroffka and H. Runge. Vacuum23, 447 (1973)

• Publisher: Elsevier Science
• Year: 1974
• Tongue: English
• Weight: 68 KB
• Volume: 13
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(74)90551-4