✦ LIBER ✦
Method and apparatus for cathode sputtering using a cylindrical cathode: Western Electric Co, Inc, US Patent 3, 314, 873, Official Gaz US Patent Office, 837 (3), 18th April 1967, 914
- Publisher
- Elsevier Science
- Year
- 1967
- Tongue
- English
- Weight
- 166 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0042-207X
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