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Metastable surface layer of a silicon nitride thin film growing by photo-chemical vapor deposition

✍ Scribed by Toshimasa Wadayama; Wataru Suëtaka

Book ID: 118362649
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 411 KB
Volume: 218
Category: Article
ISSN: 0039-6028
DOI: 10.1016/0039-6028(89)90150-7

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