✦ LIBER ✦
Metastable doping behavior in antimony-implanted (100) silicon: J S Williams and K T Short, J Appl Phys, 53 (12), 1982, 8663–8667
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 148 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0042-207X
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