Metalorganic molecular beam epitaxy of γ-Al2O3 insulator films on Si with laser irradiation

✍ Scribed by Kazuaki Sawada; Makoto Ishida; Tetsuro Nakamura; Tetsuo Suzaki

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 520 KB
• Volume: 95
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(89)90451-x