Metalorganic Chemical Vapor Deposition of Antimony Oxide Films on Semiconductor Substrates

✍ Scribed by O. N. Mittov; N. I. Ponomareva; I. Ya. Mittova

• Book ID: 110341988
• Publisher: SP MAIK Nauka/Interperiodica
• Year: 2002
• Tongue: English
• Weight: 46 KB
• Volume: 38
• Category: Article
• ISSN: 0020-1685
• DOI: 10.1023/a:1015861418396