Metal vapour vacuum arc ion implantation to synthesize FeSi2 layers on Si(100) and Si(111)

✍ Scribed by Zhu, D. H. ;Chen, Y. G. ;Liu, B. X.

• Book ID: 105384866
• Publisher: John Wiley and Sons
• Year: 1995
• Tongue: English
• Weight: 475 KB
• Volume: 152
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.2211520215