✦ LIBER ✦
MEMS variable capacitance devices utilizing the substrate: I. Novel devices with a customizable tuning range
✍ Scribed by Elshurafa, Amro M; El-Masry, Ezz I
- Book ID
- 121000437
- Publisher
- Institute of Physics
- Year
- 2010
- Tongue
- English
- Weight
- 993 KB
- Volume
- 20
- Category
- Article
- ISSN
- 0960-1317
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