✦ LIBER ✦
MEMS tunable capacitors with fragmented electrodes and rotational electro-thermal drive
✍ Scribed by A. Mehdaoui; M. B. Pisani; D. Tsamados; F. Casset; P. Ancey; A. M. Ionescu
- Publisher
- Springer-Verlag
- Year
- 2007
- Tongue
- English
- Weight
- 324 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0946-7076
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