MEMS: Some Self-Assembly Required
β Scribed by Srinivasan, Uthara; Helmbrecht, Michael A.; Muller, Richard S.; Howe, Roger T.
- Book ID
- 115436986
- Publisher
- Optical Society of America
- Year
- 2002
- Tongue
- English
- Weight
- 589 KB
- Volume
- 13
- Category
- Article
- ISSN
- 1047-6938
No coin nor oath required. For personal study only.
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