MEMS Linear and Nonlinear Statics and Dynamics

✍ Scribed by Mohammad I. Younis (auth.)

• Publisher: Springer US
• Year: 2011
• Tongue: English
• Leaves: 470
• Series: Microsystems 20
• Edition: 1
• Category: Library

✦ Synopsis

MEMS Linear and Nonlinear Statics and Dynamics presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. This book also provides an in-depth analysis and treatment of the most common static and dynamic phenomena in MEMS that are encountered by engineers. Coverage also includes nonlinear modeling approaches to modeling various MEMS phenomena of a nonlinear nature, such as those due to electrostatic forces, squeeze-film damping, and large deflection of structures. The book also:

• Includes examples of numerous MEMS devices and structures that require static or dynamic modeling including accelerometers, gyroscopes, and Atomic Force Microscopes.

• Offers real world problems related to the dynamics of MEMS such as static and dynamic pull-in, buckling, and failure due to capillary forces.

• Presents in-depth treatment of the statics and dynamics of electrostatic MEMS including universal pull-in curves and natural frequencies of common microbeams, performance analysis of micromirrors and torsional actuators, nonlinear dynamics of MEMS resonators and associated phenomena, as well as design issues related to comb-drive actuators.

• Features detailed discussions of the effect of mechanical shock on microstructures.

MEMS Linear and Nonlinear Statics and Dynamics is an ideal volume for researchers and engineersworking in MEMS design, modeling, and characterization.

✦ Table of Contents

Front Matter....Pages 1-1
MEMS, Their Features, and Modeling Challenges....Pages 1-12
Vibrations of Lumped-Parameter Systems....Pages 13-56
Sensing and Actuation Actuation in MEMS....Pages 57-96
Elements of Lumped-Parameter Modeling in MEMS....Pages 97-153
Introduction to Nonlinear Dynamics....Pages 155-249
Microbeams....Pages 251-357
Nonlinear Dynamics of an Electrically Actuated Resonator....Pages 359-399
Mechanical Shock Shock in MEMS....Pages 401-442
Back Matter....Pages 440-440

✦ Subjects

Electronics and Microelectronics, Instrumentation;Circuits and Systems;Nanotechnology;Statistical Physics, Dynamical Systems and Complexity