MEMS-Capacitive Pressure Sensor Fabricated Using Printed-Circuit-Processing Techniques

✍ Scribed by Palasagaram, J.N.; Ramadoss, R.

• Book ID: 115508056
• Publisher: IEEE
• Year: 2006
• Tongue: English
• Weight: 230 KB
• Volume: 6
• Category: Article
• ISSN: 1530-437X
• DOI: 10.1109/jsen.2006.884430