✦ LIBER ✦
MEMS cantilever sensor for non-destructive metrology within high-aspect-ratio micro holes
✍ Scribed by Erwin Peiner; Lutz Doering
- Book ID
- 106185821
- Publisher
- Springer-Verlag
- Year
- 2009
- Tongue
- English
- Weight
- 626 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0946-7076
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