✦ LIBER ✦
MEMS based humidity sensor using Si cantilever beam for harsh environmental conditions
✍ Scribed by N. J. R. Muniraj
- Book ID
- 106186027
- Publisher
- Springer-Verlag
- Year
- 2010
- Tongue
- English
- Weight
- 320 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0946-7076
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