Mems

✍ Scribed by Nitaigour Premchand Mahalik

• Publisher: Tata McGraw-Hill Pub.
• Year: 2007
• Tongue: English
• Leaves: 496
• Category: Library

✦ Table of Contents

Cover
Contents
Preface
Acknowledgements
Chapter 1: Introduction
Chapter 2: Micromachining
Chapter 3: System Modeling and Properties of Material
Chapter 4: Passive Components and Systems
Chapter 5: Mechanical Sensors and Actuators
Chapter 6: Thermal Sensors and Actuators
Chapter 7: Micro-opto-electromechanical Systems
Chapter 8: Magnetic Sensors and Actuators
Chapter 9: Radio Frequency (RF) MEMS
Chapter 10: Microfluidic Systems
Chapter 11: Chemical and Biomedical Microsystems
Chapter 12: CNT and Nanotechnology
Chapter 13: Simulation Based Micro and Nanosystem Design
Chapter 14: Performance Indices and Device Array
References
Index