✦ LIBER ✦
Mechatronics || Multi-channel Laser Interferometer for Parallel Characterization of MEMS Microstructures
✍ Scribed by Jabloński, Ryszard; Březina, Tomaš
- Book ID
- 121081646
- Publisher
- Springer Berlin Heidelberg
- Year
- 2011
- Weight
- 490 KB
- Category
- Article
- ISBN
- 3642232442
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