Mechanisms of SiO 2 Etching: Ab Initio Calculations on the Reactions of CF m - ( m = 3−1) and NF n - ( n = 2, 1) Ions with Local Surface Models

✍ Scribed by Jenichen, Arndt

• Book ID: 126154367
• Publisher: American Chemical Society
• Year: 1997
• Tongue: English
• Weight: 155 KB
• Volume: 101
• Category: Article
• ISSN: 0022-3654
• DOI: 10.1021/jp970450m