Mechanisms of radical production in radiofrequency discharges of Cf3Cl, CF3Br, and certain other plasma etchants: spectrum of a transient species. (USA)

• Publisher: Elsevier Science
• Year: 1981
• Tongue: English
• Weight: 168 KB
• Volume: 31
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/s0042-207x(81)80246-1