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Mechanisms of Pb(zr 0.53 Ti 0.47 )O 3 thin film etching with ECR/RF reactor

✍ Scribed by Baborowski, J.; Muralt, P.; Ledermann, N.; Colla, E.; Seifert, A.; Gentil, S.; Setter, N.

No coin nor oath required. For personal study only.

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