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Mechanisms of formation of sputtered particles in excited states at Ar+ ion bombardment of oxide targets

โœ Scribed by V.V. Bobkov; S.P. Gokov; V.V. Gritsyna; V.T. Gritsyna; D.I. Shevchenko; S.S. Alimov


Book ID
103861692
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
238 KB
Volume
256
Category
Article
ISSN
0168-583X

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