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Mechanism of the Trefonas Effect (Polyphotolysis) in Novolak−Diazonaphthoquinone Resists

✍ Scribed by Han, Yu-Kai; Yan, Zhenglin; Reiser, Arnost

Book ID
127239059
Publisher
American Chemical Society
Year
1999
Tongue
English
Weight
90 KB
Volume
32
Category
Article
ISSN
0024-9297

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