✦ LIBER ✦
Mechanism of the etching rate change of aluminosilicate glass in HF acid with micro-indentation
✍ Scribed by Yasuhiro Saito; Shinya Okamoto; Hiroyuki Inomata; Junji Kurachi
- Book ID
- 104002688
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 433 KB
- Volume
- 255
- Category
- Article
- ISSN
- 0169-4332
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✦ Synopsis
The etching rate of some kind of glass decreases with micro-indentation. This paper is concerned chiefly with the mechanism for aluminosilicate glass. The change of glass surface condition arising from the indentation and the etching has been examined with X-ray photoelectron spectroscopy (XPS). It was found that the leaching reaction observed through the HF acid etching at non-indented area was restricted at the indented area. The etching rate change should be attributed to the leaching mechanism.