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Mechanism of silane oxidation

✍ Scribed by Azatyan, V. V. ;Kalkanov, V. A. ;Shavard, A. A.


Book ID
112693249
Publisher
Springer
Year
1980
Tongue
English
Weight
224 KB
Volume
15
Category
Article
ISSN
0133-1736

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The mechanism of silane thermal decomposition is investigated in a flow reactor. The time dependencies of silane consumption and disilane formation were compared with those parameters of solid product (aerosol particles) such as concentration, total hydrogen content in solid product, and fraction of

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The homogeneous gas-phase decomposition kinetics of silane has been investigated using the single-pulse shock tube comparative rate technique (T = 1035-1184Β°K, P ~d = 4000 Torr). The initial reaction of the decomposition SiH4 ! + SiHz + H2 is a unimolecular process in its pressure fall-off regime w