Formation of defect structures in hard n
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D. Rafaja; C. WΓΌstefeld; M. Dopita; V. Klemm; D. Heger; G. Schreiber; M. Ε Γma
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Article
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2008
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Elsevier Science
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English
β 928 KB
N Zr-Al-N Thin film nanocomposites Microstructure defects XRD TEM Formation of structure defects and other microstructure phenomena in hard Cr-Al-(Si-)N, Ti-Al-(Si-)N and Zr-Al-N nanocomposite coatings with different aluminium and silicon contents deposited by using cathodic arc evaporation was inv