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Mechanism and kinetics of the diffusion of gold in silicon

✍ Scribed by U. Gösele; W. Frank; A. Seeger


Publisher
Springer
Year
1980
Tongue
English
Weight
756 KB
Volume
23
Category
Article
ISSN
1432-0630

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Sample controlled reaction temperature (SCRT) has been used for the first time to study the kinetics of the carbothermal reduction of silica in nitrogen to obtain silicon nitride (Si 3 N 4 ). It is noteworthy to point out that SCRT method allows both a good control of pressure in the sample surroun