A User's Guide to Vacuum Technology || M
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O'Hanlon, John F.
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Article
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2004
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John Wiley & Sons, Inc.
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In this chapter we review the operation of five low vacuum pumps (the rotary vane and piston, scroll, screw and diaphragm pump), and two medium vacuum pumps (the lobe or Roots pump and the claw pump). Vane and piston pumps are widely used for backing high vacuum pumps and for initial chamber evacuat