Mechanical vacuum pumping equipment for applications involving corrosive and aggressive materials: J Currington et al, J Vac Sci Technol, 20 (4), 1982, 1019–1022

• Publisher: Elsevier Science
• Year: 1983
• Tongue: English
• Weight: 172 KB
• Volume: 33
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(83)90129-x