✦ LIBER ✦
Mechanical stability of reactive ion-etched poly (methylmethacrylate) and polyimide microstructures in trilevel electron beam lithography: James A Oro et al, J Appl Phys, 53 (11), 1982, 7379–7384
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 147 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0042-207X
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