✦ LIBER ✦
Mechanical response of single crystal Si to very high fluence H+ implantation
✍ Scribed by W.J. Choyke; R.B. Irwin; J.N. McGruer; J.R. Townsend; N.J. Doyle; B.O. Hall; J.A. Spitznagel; S. Wood
- Publisher
- Elsevier Science
- Year
- 1983
- Weight
- 556 KB
- Volume
- 209-210
- Category
- Article
- ISSN
- 0167-5087
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