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Mechanical rate of deposition monitor : (U.S.A.) P. E. Oberg, Rev. Sci. Instrum., 34 (9), Sept. 1963, 1055–1056

Publisher: Elsevier Science
Year: 1964
Tongue: English
Weight: 85 KB
Volume: 14
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(64)90718-3

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📂 Article 📅 1964 🏛 Elsevier Science 🌐 English ⚖ 49 KB