Multi-element (AlCrTaTiZr)N coatings are deposited onto Si and cemented carbide substrates by reactive RF magnetron sputtering in an Ar + N 2 mixture. The influence of substrate bias voltage, ranging from 0 to -200 V, on the microstructural, mechanical and tribological properties of these nitride co
Mechanical properties, deformation behaviors and interface adhesion of (AlCrTaTiZr)Nx multi-component coatings
โ Scribed by Shou-Yi Chang; Shao-Yi Lin; Yi-Chung Huang; Chia-Liang Wu
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 912 KB
- Volume
- 204
- Category
- Article
- ISSN
- 0257-8972
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โฆ Synopsis
In this study, (AlCrTaTiZr)N x multi-component coatings with quinary metallic elements were developed as protective hard coatings for tribological application. The mechanical properties, creep behaviors, deformation mechanisms and interface adhesion of the (AlCrTaTiZr)N x coatings with different N contents were characterized. With increasing the N 2 -to-total (N 2 + Ar) flow ratio, R N , during sputtering deposition, the (AlCrTaTiZr)N x coatings transformed from an amorphous metallic phase to a nanocomposite and finally a crystalline nitride structure. The hardness of the coatings accordingly increased from 13 GPa to a high value of about 30 GPa, but the creep strain rate also increased from 1.3 ร 10 -4 to 7.3 ร 10 -4 1/s. The plastic deformation of the amorphous metallic coating deposited with R N = 0% proceeded through the formation and extension of shear bands, whereas dislocation activities dominated the deformation behavior of the crystalline nitride coatings deposited with R N = 10% and 30%. With increasing R N , the interface adhesion energy between the coatings and the substrates was also enhanced from 6.1 to 22.9 J/m 2 .
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