๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Mechanical properties and wear resistance of TaN/NbN nano-multilayers

โœ Scribed by Xiaojiang Yu; Qianxi Lai; Geyang Li; Junhua Xu; Mingyuan Gu

Book ID
110401251
Publisher
Springer
Year
2002
Tongue
English
Weight
320 KB
Volume
21
Category
Article
ISSN
0261-8028

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

Structure and mechanical properties of ฮด
Structure and mechanical properties of ฮด-NbN/SiNx and ฮดโ€ฒ-NbN/SiNx nano-multilayer films deposited by reactive magnetron sputtering
โœ M. Wen; Q.N. Meng; C.Q. Hu; T. An; Y.D. Su; W.X. Yu; W.T. Zheng ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 808 KB

NbN/SiN x [X][D] ฮดโ€ฒ-NbN/SiN x [D] Multilayer [B] Nano-indentation [C] Physical vapour deposition We deposit cubic ฮด-NbN/SiN x and hexagonal ฮดโ€ฒ-NbN/SiN x nano-multilayer films using reactive magnetron sputtering in discharge of a mixture of Ar and N 2 gas, and explore the effects of SiN x layer thic