✦ LIBER ✦
Mechanical decoupling of monolithic pressure sensors in small plastic encapsulations
✍ Scribed by Wilfried Germer; Günter Kowalski
- Book ID
- 103957399
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 836 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0924-4247
No coin nor oath required. For personal study only.
✦ Synopsis
The assembly of small sensor chips is optimized to decouple the measuring system from external forces. The proposed technology allows small encapsulations to be constructed.