✦ LIBER ✦
Mechanical Damage in GaAs Wafers Introduced by a Diamond Saw: A Study by Means of Positron Annihilation and Electron Microscopy
✍ Scribed by Krause-Rehberg, R. ;Leipner, H. S. ;Polity, A. ;Rudolf, F. ;Hammer, R. ;Jurisch, M.
- Publisher
- John Wiley and Sons
- Year
- 1996
- Tongue
- English
- Weight
- 585 KB
- Volume
- 158
- Category
- Article
- ISSN
- 0031-8965
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