✦ LIBER ✦
Mechanical characterization of thick polysilicon films: Young's modulus and fracture strength evaluated with microstructures
✍ Scribed by Greek, Staffan; Ericson, Fredric; Johansson, Stefan; Fürtsch, Matthias; Rump, Arnold
- Book ID
- 120366539
- Publisher
- Institute of Physics
- Year
- 1999
- Tongue
- English
- Weight
- 492 KB
- Volume
- 9
- Category
- Article
- ISSN
- 0960-1317
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