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Mechanical characterization of single crystal silicon and UV-LIGA nickel thin films using tensile tester operated in AFM

✍ Scribed by Y. LEE; J. TADA; Y. ISONO


Book ID
109014072
Publisher
John Wiley and Sons
Year
2005
Tongue
English
Weight
445 KB
Volume
28
Category
Article
ISSN
8756-758X

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