✦ LIBER ✦
Mechanical behaviour of micromachined sensor membranes under uniform external pressure affected by in-plane stresses using a Ritz method and Hermite polynomials
✍ Scribed by R. Steinmann; H. Friemann; C. Prescher; R. Schellin
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 760 KB
- Volume
- 48
- Category
- Article
- ISSN
- 0924-4247
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