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Mechanical behavior of TiN/CrN nano-multilayer thin film deposited by unbalanced magnetron sputter process

โœ Scribed by Pei-Ling Sun; Cherng-Yuh Su; Tai-Pin Liou; Cheng-Hsun Hsu; Chung-Kwei Lin

Book ID
116607975
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
586 KB
Volume
509
Category
Article
ISSN
0925-8388

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